Nanocrystalline ZnO thin films were deposited by intermittent spray pyrolysis using different alcoholic and aqua-alcoholic precursor solvents. The XRD analysis reveals the polycrystallimty of hexagonal wurtzite type ZnO films with preferred c-axis orientation along (002] direction. The polycrvstallinity increased due to use of aqua-alcoholic precursor solvent. The crystallite size was found to vary from 41,7 nm to 59,4 nm and blue shift in band-gap energy (3,225 eV to 3,255 eV) was observed due to aquaalcoholic to alcoholic precursor solvent transition. The films deposited using alcoholic precursor solvent exhibited high transmittance (>> 92 %) with low dark resistivity (<$E10 sup -3 ~OMEGA~cdot~cm>) as compared to aqua-alcoholic precursor solvent. The effect of precursor solvent on resistivity, carrier concentration (<$Eeta - "/" cm sup 3>), carrier mobility (<$Emu -sm sup 2 V sup -1 s sup -1>), sheet resistance and figure of merit (<$EPHI sub TC>) is also reported. We recommend ethanol or methanol as a superior precursor solvent over aqua-alcoholic precursor solvent for deposition of device quality ZnO thin films.

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