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Gorbov I. V. High-density data recording via laser thermo-lithography and ion-beam etching [Електронний ресурс] / I. V. Gorbov, A. A. Kryuchyn, K. P. Grytsenko, D. Yu. Manko, Yu. O. Borodin // Semiconductor physics, quantum electronics & optoelectronics. - 2014. - Vol. 17, № 1. - С. 52-55. - Режим доступу: http://nbuv.gov.ua/UJRN/MSMW_2014_17_1_12 Pits 250 - 300 nm wide were obtained on the surface of thin organic nanocomposite film using master-disc laser-burning station with 405 nm laser beam focused by 0,85 NA lens. The film with obtained pits was used as a mask for subsequent reactive ion-beam etching of glass substrate. Finally, 150 - 200 nm pits were performed on the substrate surface. Nanocomposite films were based on organic positive photoresist with a dye inclusions. This dye is characterized by wide absorption band within the spectral region 390 - 410 nm and can be evaporated by laser irradiation with the wavelength 405 nm.
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