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Benhaliliba M. AC Impedance Analysis of the Al / ZnO / p-Si / Al Schottky Diode: C-V Plots and Extraction of Parameters [Електронний ресурс] / M. Benhaliliba, Y. S. Ocak, H. Mokhtari, T. Kilicoglu // Журнал нано- та електронної фізики. - 2015. - Т. 7, № 2. - С. 02001-1-02001-4. - Режим доступу: http://nbuv.gov.ua/UJRN/jnef_2015_7_2_3 In this research, we report on the measurement of the capacitance-voltage (C-V) characteristics Al/ZnO/p-Si/Al Schottky diode at room temperature and in dark condition fabricated by spray pyrolysis process. C-V characteristics, within the range of frequencies 50 kHz - 5 MHz, are investigated and microelectronic parameters are extracted. Donor density and diffusion potential vary with frequency from 15 to 28 1014 cm-3, 0,21 to 0,45 V. Besides, the interface state density of Al/ZnO/pSi/Al Schottky is determined and found to be 1012 (eV x cm2)-1. Calculated at 1 MHz, the interfacial layer thickness and depletion layer width are of 760 Å and 0,28 mu M.
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