The equivalent circuit of betavoltaics silicon pn diode is proposed. The circuit includes the current source from betavoltaics effect, ideal pn diode, shunt and series resistances, and also barrier capacity with charge on it. The model allows to explain that increasing of charge on the surface silicon pn diode must decrease the effectiveness of energy conversion. As example, we showed that the open circuit voltage is decreased during irradiation time from beta source Ni-63 and it rapidly becomes higher after discharging.

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