Spectral ellipsometry technique is demonstrated to be a useful tool for the investigation of optical and magneto-optical parameters of magnetic heterostructures. Ellipsometry parameters psi, DELTA were measured in the range of 350 - 1000 nm. Solving the inverse problem by a regression method the refractive index and thickness of the layers were deduced. Magneto-optical spectra were detected in the configuration of equatorial Kerr effect which is fully compatible with the ellipsometry measurements. Spectroscopic ellipsometry method of magnetic structure characterisation can be used for in situ monitoring of magnetic film growth in various processes such as magnetron sputtering, electron beam evaporation and ion beam sputtering.

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