Structural relaxation process in Fe75Si6B14Mo5 amorphous alloy has been studied by means of X-ray diffraction method. Structure parameters, obtained from analysis of structure factors and pair correlation functions are used in order to clarify this phenomenon on the short range order scale. More detailed analysis was done for profile of second maxima in structure factors. Results showed that rearrangement of atomic clusters occurs at high temperature relaxation. The structure relaxation is accompanied by formation the clusters of less size due to which an atomic distribution becomes more close to perfect amorphous structure.

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