Наукова періодика України | Geodesy, cartography and aerial photography | ||
Ivanchuk О. Development and research of technology for automation of the calibration and account of digital SEM images geometric distortion obtained with JCM 5000 (NeoScope) (JEOL, Japan) / О. Ivanchuk, O. Tumska // Geodesy, cartography and aerial photography. - 2016. - Вип. 84. - С. 56-64. - Режим доступу: http://nbuv.gov.ua/UJRN/Geodez_2016_84_8 Purpose. Solids microsurface digital images obtained with scanning electron microscopes (SEM) are characterized by significant geometric distortions, which must be defined and taken into account when determining the quantitative parameters of microsurface solids with high accuracy. Therefore, this problem is so important and urgent, especially during the high-tech quality control of production processes using nanotechnology, particularly in mechanical engineering, aircraft construction, and for creating space and military equipment. It is also important to perform SEM images measurements and obtain quantitative parameters of the studied microsurface in automatic mode that would allow processing of the data much faster without operator intervention. Therefore, the aim of this work was to develop and research the effective technology for automated calibration and account for the SEM images geometric distortion as well as the creation of a software package that would implement it. Methods. Digital SEM images processing and their transformations were used to automate the measurement. Results. The developed automation technology for digital SEM images measurement was tested and studied in the treatment of SEM images of the reference test object with a resolution of r = 1425 lines/mm, obtained with SEM using the JCM-5000 (NeoScope) in the range of magnifications from 1,000<^>x Цитованість авторів публікації: Бібліографічний опис для цитування: Ivanchuk О. Development and research of technology for automation of the calibration and account of digital SEM images geometric distortion obtained with JCM 5000 (NeoScope) (JEOL, Japan) / О. Ivanchuk, O. Tumska // Geodesy, cartography and aerial photography. - 2016. - Вип. 84. - С. 56-64. - Режим доступу: http://nbuv.gov.ua/UJRN/Geodez_2016_84_8. Якщо, ви не знайшли інформацію про автора(ів) публікації, маєте бажання виправити або відобразити більш докладну інформацію про науковців України запрошуємо заповнити "Анкету науковця"
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