This paper reports on the deposition and surface properties of the pure and doped zinc oxide layers produced by spin coating route. Pure and metallic (Al, Sn, Cd, Co) doped ZnO films are characterized by mean of atomic force microscopy (AFM). Based on atomic force microscope observation, some parameters such as grain size, height, orientation of angle and histogram are determined. The AFM scanned 2D and 3D-views permit us to discover the roughness, the average height and the skewness of clusters or grains.